Online Simulation in Semiconductor Manufacturing

In semiconductor manufacturing discrete event simulation systems are quite established to support multiple planning decisions. During the recent years, the productivity is increasing by using simulation methods. The motivation for this thesis is to use online simulation not only for planning decisions, but also for a wide range of operational decisions. Therefore an integrated online simulation system for short term forecasting has been developed. The production environment is a mature high mix logic wafer fab. It has been selected because of its vast potential for performance improvement. In this thesis several aspects of online simulation will be addressed: The first aspect is the implementation of an online simulation system in semiconductor manufacturing. The general problem is to achieve a high speed, a high level of detail, and a high forecast accuracy. To resolve these problems, an online simulation system has been created. The simulation model has a high level of detail. It is created automatically from underling fab data. To create such a simulation model from fab data, additional problems related to the underlying data arise. The major parts are the data access, the data integration, and the data quality. These problems have been solved by using an integrated data model with several data extraction, data transformation, and data cleaning steps. The second aspect is related to the accuracy of online simulation. The overall problem is to increase the forecast horizon, increase the level of detail of the forecast and reduce the forecast error. To provide useful forecast results, the simulation model contains a high level of modeling details and a proper initialization. The influences on the forecast quality will be analyzed. The results show that the simulation forecast accuracy achieves good quality to predict future fab performance. The last aspect is to find ways to use simulation forecast results to improve the fab performance. Numerous applications have been identified. For each application a description is available. It contains the requirements of such a forecast, the decision variables, and background information. An application example shows, where a performance problem exists and how online simulation is able to resolve it. To further enhance the real time capability of online simulation, a major part is to investigate new ways to connect the simulation model with the wafer fab. For fab driven simulation, the simulation model and the real wafer fab run concurrently. The wafer fab provides several events to update the simulation during runtime. So the model is always synchronized with the real fab. It becomes possible to start a simulation run in real time. There is no further delay for data extraction, data transformation and model creation. A prototype for a single work center has been implemented to show the feasibility

Compared to maximal current management standards, oscillating positive expiratory pressure devices have not been shown to improve clinically relevant outcomes in COPD patients with acute exacerbation

A critical appraisal and clinical application of Ambrosino N, Callegari G, Galloni C, Brega S, Pinna G. Clinical evaluation of oscillating positive expiratory pressure for enhancing expectoration in diseases other than cystic fibrosis. Monaldi Arch Chest Dis. 1995;50(4):269-275

Dust and gas emission from cometary nuclei: the case of comet 67P/Churyumov-Gerasimenko

Comets display with decreasing solar distance an increased emission of gas and dust particles, leading to the formation of the coma and tail. Spacecraft missions provide insight in the temporal and spatial variations of the dust and gas sources located on the cometary nucleus. For the case of comet 67P/Churyumov-Gerasimenko (67P/C-G), the long-term observations from the Rosetta mission point to a homogeneous dust emission across the entire illuminated surface. Despite the homogeneous initial distribution, a collimation in jet-like structures becomes visible. We propose that this observation is linked directly to the complex shape of the nucleus and projects concave topographical features into the dust coma. To test this hypothesis, we put forward a gas-dust description of 67P/C-G, where gravitational and gas forces are accurately determined from the surface mesh and the rotation of the nucleus is fully incorporated. The emerging jet-like structures persist for a wide range of gas-dust interactions and show a dust velocity dependent bending.Comment: 17 pages, with 7 figures. To appear in Advances in Physics X (2018

Cluster-based network modeling: From snapshots to complex dynamical systems

We propose a universal method for data-driven modeling of complex nonlinear dynamics from time-resolved snapshot data without prior knowledge. Complex nonlinear dynamics govern many fields of science and engineering. Data-driven dynamic modeling often assumes a low-dimensional subspace or manifold for the state. We liberate ourselves from this assumption by proposing cluster-based network modeling (CNM) bridging machine learning, network science, and statistical physics. CNM describes short- and long-term behavior and is fully automatable, as it does not rely on application-specific knowledge. CNM is demonstrated for the Lorenz attractor, ECG heartbeat signals, Kolmogorov flow, and a high-dimensional actuated turbulent boundary layer. Even the notoriously difficult modeling benchmark of rare events in the Kolmogorov flow is solved. This automatable universal data-driven representation of complex nonlinear dynamics complements and expands network connectivity science and promises new fast-track avenues to understand, estimate, predict, and control complex systems in all scientific fields

Metric for attractor overlap

We present the first general metric for attractor overlap (MAO) facilitating an unsupervised comparison of flow data sets. The starting point is two or more attractors, i.e., ensembles of states representing different operating conditions. The proposed metric generalizes the standard Hilbert-space distance between two snapshots to snapshot ensembles of two attractors. A reduced-order analysis for big data and many attractors is enabled by coarse-graining the snapshots into representative clusters with corresponding centroids and population probabilities. For a large number of attractors, MAO is augmented by proximity maps for the snapshots, the centroids, and the attractors, giving scientifically interpretable visual access to the closeness of the states. The coherent structures belonging to the overlap and disjoint states between these attractors are distilled by few representative centroids. We employ MAO for two quite different actuated flow configurations: (1) a two-dimensional wake of the fluidic pinball with vortices in a narrow frequency range and (2) three-dimensional wall turbulence with broadband frequency spectrum manipulated by spanwise traveling transversal surface waves. MAO compares and classifies these actuated flows in agreement with physical intuition. For instance, the first feature coordinate of the attractor proximity map correlates with drag for the fluidic pinball and for the turbulent boundary layer. MAO has a large spectrum of potential applications ranging from a quantitative comparison between numerical simulations and experimental particle-image velocimetry data to the analysis of simulations representing a myriad of different operating conditions.Comment: 33 pages, 20 figure

Nonlinear Information Filtering for Distributed Multisensor Data Fusion

The information filter has evolved into a key tool for distributed and decentralized multisensor estimation and control. Essentially, it is an algebraical reformulation of the Kalman filter and provides estimates on the information about an uncertain state rather than on a state itself. Whereas many practicable Kalman filtering techniques for nonlinear system and sensor models have been developed, approaches towards nonlinear information filtering are still scarce and limited. In order to deal with nonlinear systems and sensors, this paper derives an approximation technique for arbitrary probability densities that provides the same distributable fusion structure as the linear information filter. The presented approach not only constitutes a nonlinear version of the information filter, but it also points the direction to a Hilbert space structure on probability densities, whose vector space operations correspond to the fusion and weighting of information

xROM: A Toolkit for Reduced-Order Modeling of Fluid Flows

This book initiates the new Series `Machine Learning Tools in Fluid Mechanics' published by the Technische Universität Braunschweig. The series focuses on machine learning tools for fluid mechanics tasks, like analysis, dynamic modeling, response modeling, control and closures. The tools comprise documentations of publicly available software packages, of good practices and of application studies. Our book introduces the software platform xROM, which is a freely available package for spectral analysis and reduced-order modeling. Initially, xROM was developed as a tool to quickly derive dynamic POD models from snapshot data and Galerkin projection using the Navier-Stokes equations. This purpose has since expanded, and xROM has become a platform that allows easy modular expansions and collaborations with partners worldwide. In this book, however, we focus on POD-based Galerkin modeling for reasons of simplicity

Active Transport of Peptides Across the Intact Human Tympanic Membrane.

We previously identified peptides that are actively transported across the intact tympanic membrane (TM) of rats with infected middle ears. To assess the possibility that this transport would also occur across the human TM, we first developed and validated an assay to evaluate transport in vitro using fragments of the TM. Using this assay, we demonstrated the ability of phage bearing a TM-transiting peptide to cross freshly dissected TM fragments from infected rats or from uninfected rats, guinea pigs and rabbits. We then evaluated transport across fragments of the human TM that were discarded during otologic surgery. Human trans-TM transport was similar to that seen in the animal species. Finally, we found that free peptide, unconnected to phage, was transported across the TM at a rate comparable to that seen for peptide-bearing phage. These studies provide evidence supporting the concept of peptide-mediated drug delivery across the intact TM and into the middle ears of patients